Micro-technology products and sevices. MEMS based ultra compact mass flow meters and controllers, modules and systems. MEMS based broadband infrared (IR) sources. Diode-based laser gas detection (LGD) OEM modules. Micro Optics and MEMS Services.
Mass Flow Devices – Mass Spectroscopy – MFC 2222
Small ultra compact mass flow controller module with RS-232 EIA and analog 0…5 V interface, based on the propertiarie Platinium MEMS technology from Axetris
MEMS and Nanotechnology Exchange
What is MEMS Technology?
“Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology…..
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